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Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride
Department of Meteorology, University of Reading, Reading, UK
Department of Meteorology, University of Reading, Reading, UK
Physical and Environmental Sciences Department, Ford Motor Company, Dearborn, Michigan, USA
Department of Meteorology, University of Reading, Reading, UK
Physical and Environmental Sciences Department, Ford Motor Company, Dearborn, Michigan, USA
Nitrogen trifluoride (NF3) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF3. Laboratory measurements give an integrated absorption cross section of 7.04 × 10−17 cm2 molecule−1 cm−1 over the spectral region 200–2000 cm−1. The radiative efficiency is calculated to be 0.21 Wm−2 ppbv−1 and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross-sections reported here.
Received 5 March 2006; accepted 24 April 2006; published 31 May 2006.
Citation: (2006), Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride, Geophys. Res. Lett., 33, L10817, doi:10.1029/2006GL026210.
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