We analyze the role of megathrust geometry on slip estimation using the 1960 Chile earthquake (M _W = 9.5) as an example. A variable slip distribution for this earthquake has been derived by Barrientos and Ward (1990) applying an elastic dislocation model with a planar fault geometry. Their model shows slip patches at 80–110 km depth, isolated from the seismogenic zone, interpreted as aseismic slip. We invert the same geodetic data set using a finite element model (FEM) with precise geometry derived from geophysical data. Isoparametric FEM is implemented to constrain the slip distribution of curve-shaped elements. Slip resolved by our precise geometry model is limited to the shallow region of the plate interface suggesting that the deep patches of moment were most likely an artifact of the planar geometry. Our study emphasizes the importance of fault geometry on slip estimation of large earthquakes.